Method of pattern placement correction

ABSTRACT

In one embodiment of the invention, a method for correcting a pattern placement on a substrate is disclosed. The method begins by detecting three reference points for a substrate. A plurality of sets of three die location points are detected, each set indicative of an orientation of a die structure, the plurality of sets include a first set associated with a first dies and a second set associated with a second die. A local transformation is calculated for the orientation of the first die and the second on the substrate. Three orientation points are selected from the plurality of sets of three die location points wherein the orientation points are not set members of the same die. A first global orientation of the substrate is calculated from the selected three points from the set of points and the first global transformation and the local transformation for the substrate are stored.

BACKGROUND Field

Embodiments of the present disclosure generally relate to methods forprocessing one or more substrates, and more specifically to methods forperforming photolithography processes.

Description of the Related Art

Microlithography techniques are generally employed to create electricalfeatures incorporated as part of a die formed on a substrate. Accordingto this technique, a light-sensitive photoresist is typically applied toa surface of the substrate. Then, a pattern generator exposes selectedareas of the light-sensitive photoresist as part of a pattern with lightto cause chemical changes to the photoresist in the selective areas tocreate a mask. The mask is utilized to transfer a pattern during thecreation of the electrical features that eventually make up the die.

However, as multiple operations are involved in the formation of theelectrical features, high placement accuracy for masks forming theindividual dies are required to align the connections. The placementaccuracy requirement limits throughput and increase cost. Warpage of thesubstrate, among other issues, can lead to connection misplacement inthe individual dies. Excessive die drift during pick-and-place operationalso contribute to yield loss. Thus, misplacing cingulated chips to forma molded panel can lead to pattern overlay difficulties in the buildupprocess when traditional lithography is used.

Therefore, there is a need for an improved system and method forphotolithography.

SUMMARY

In one embodiment of the invention, a method for correcting a patternplacement on a substrate is disclosed. The method begins by detectingthree reference points for a substrate. A plurality of sets of three dielocation points are detected, each set indicative of an orientation of adie structure, the plurality of sets include a first set associated witha first dies and a second set associated with a second die. A localtransformation is calculated for the orientation of the first die andthe second on the substrate. Three orientation points are selected fromthe plurality of sets of three die location points wherein theorientation points are not set members of the same die. A first globalorientation of the substrate is calculated from the selected threepoints from the set of points and the first global transformation andthe local transformation for the substrate are stored.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentinvention can be understood in detail, a more particular description ofthe invention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1 is a schematic view of a substrate disposed in a metrologysystem.

FIGS. 2A-2D depict various profiles for the substrate of FIG. 1.

FIG. 3 is a schematic view of the substrate disposed in aphotolithography system.

FIG. 4 is a schematic view depicting features of a die on the substrate.

FIG. 5 depicts a method for creating a global transformation for alocation of the dies on the substrate.

FIG. 6 depicts a method for creating an effective transformation for alithography operation on the substrate.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneembodiment may be beneficially utilized on other embodiments withoutspecific recitation.

DETAILED DESCRIPTION

The present invention includes methods and apparatus for correcting apattern placement on a substrate during a photolithography processes. Inone embodiment, the substrate is transferred to a metrology tool. Thesubstrate is measured to determine die locations on the substrate, skewof the dies, warpage of the substrate, and other pattern mappings. Thesubstrate is subsequently moved to a digital lithography system forprocessing therein. Die misplacement on the substrate is corrected byapplying a per-die digital mask alignment correction. Correction forsubstrate warpage induced placement errors of each die is performed byapplying a model based pattern placement correction algorithm based onthe measurements taken from the metrology tool.

FIG. 1 is a schematic view of a substrate 104 disposed in a metrologysystem 100. The metrology system 100 may have a scanner 160. The scanner160 may move in a first direction 161 and a second direction 163 tofully measure the substrate 104. The scanner 160 may utilize a laser,optical or acoustical sensor or other techniques for measuring locationinformation associated with structures, such as dies, formed on thesubstrate 104.

The metrology system 100 may have a controller 170. Alternately, themetrology system 100 may be coupled to the controller 170. Thecontroller 170 may have a central processing unit 172 and memory 174.The controller 170 may optionally have input output devices 176 fromwhich the controller 170 may interface with other devices as humans. Thememory 174 may store program code for running on the CPU 172. The memory174 may additionally store information such as measurements and processparameters associated with the substrate 104.

The substrate 104 may have an outer edge 110, a top surface 118 and anotch 112. The notch 112 may be used to orient the substrate 104. Thesubstrate 104 may have a plurality of dies 152 disposed on the topsurface 118. The dies 152 may be arranged in rows 154 and columns 150.Alternately, the dies 152 may be arranged in other suitableconfigurations, such as radially or in concentric circles.

The scanner 160 may move across the substrate 104 to providemeasurements, such as along an X, Y and Z Cartesian coordinate or alonga polar coordinate, for each of the dies 152, among other features onthe substrate 104. For example, the scanner 160 may measure locationsalong or in a first die 142. The scanner 160 may additionally measurereference marks (not shown) on the substrate 104. The measurements maybe stored in memory 174 and associated with one or more substrates 104.The information stored in the memory 174 may be made accessible to otherprocessing equipment such as a photolithography system described belowwith reference to FIG. 3.

The measurements from the metrology system 100 may be used to determinewhether the locations of the dies 152 are skewed or misaligned comparedto a predicted or planned layout for the dies 152. The measurements fromthe metrology system 100 may also be used to develop a global profile,i.e., shape, of the substrate 104. For example, the global profile mayindicate and correct for warpage. FIGS. 2A-2D depict example for globalprofiles of the substrate 104 shown in FIG. 1. It should be appreciatedthat the substrate 104 may have alternate global profiles which may bemodeled with the measurement data from the metrology system and theexamples provided herein are merely to convey an understanding of theglobal profiles one or more substrates 104 may have.

High order warpage effects can be presented in different forms such asshown in FIGS. 2A through 2D. Warpage of the substrate is characterizedby high order global 2D models whereas die misplacement/location may bemodeled by linear models. Correction may be selectively applied indifferent regions of the substrate corresponding to individual dielocations or along a surface prescribed by the global 2D model. However,it should also be appreciated that the warpage and die locations mayalternately utilize 3D models for determining the locations and profilethereof.

FIG. 2A illustrates a substrate 104A resting on a planar surface 290.The substrate 104A may have a concave profile wherein edges 210 arecurved upwards and away from the planar surface 290. For example, theconcave profile may appear to have the shape of a dish. FIG. 2Billustrates a substrate 104B resting on the planar surface 290. Thesubstrate 104B may have a convex profile wherein the edges 210 are incontact with the planar surface 290 and a mid-portion 230 of thesubstrate 104 is elevated upwards away from the planar surface 290. Forexample, the convex profile may appear to have an upside down dishshape. Additionally, the warpage may include a combination of two ormore of the profiles. Such a profile may present itself as a sinusoid orother curve type shape. FIG. 2C illustrates a substrate 104C resting ona planar surface 290. The substrate 104C may have a sinusoidal profilewherein a first edge 212 is elevated off the planar surface 290 and asecond edge 214 is disposed thereon. FIG. 2D illustrates a substrate104D resting on a planar surface 290. The substrate 104D may have asinusoidal profile extending beyond a single period. For example thefirst edge 212, second edge 214 and mid-portion 230 may be elevated offthe planar surface 290. With other portions of the substrate 104Ddisposed thereon. The profiles for the substrate 104 shown in FIGS.2A-2D are merely illustrative and it should be appreciated that otherprofiles, both simple and complex, may be present on the substrate andmodeled.

The measurements from the metrology system may be utilized to model thesubstrate 104 and correct for misplaced die locations on the substrateas well as warpage during further processing. For example, themeasurements may be utilized to form a local level die model fordetermining x/y rotation, expansion, and shift (local transformation)per die. The model may use at least three points on each and every diefor calculating such a model. The points of measurement associated witha particular die may correspond to a set. For example, there may be ‘n’set of measurement points corresponding to the number of dies on thesubstrate 104. Additionally, a global model may be developed for thesubstrate 104 indicating warpage or global x/y rotation, expansion, andshift of the entire top surface 118 of the substrate 104 (i.e., globaltransformation). The global model may utilize at least three points,each point from a different set of die measurements, three separatealignment marks, or other distal reference measurements, to calculatethe global transformation. The combination of the local transformationalong with the global transformation is used to modify processingparameters to ensure greater accuracy of alignment for die leveloperations, such as a photolithography operation.

FIG. 3 is a schematic view of the substrate 104 disposed in aphotolithography system 300. The photolithography system 300 may includea pair of tracks supported by a pair of the supports. Two or more chucks330 may move along the tracks in a first direction 361 and a seconddirection 363. The track and the supports may be lifted by an airbearing system, magnetic channels or by other suitable techniques duringoperation. The chuck 330 may be a vacuum chuck that secures thesubstrate 104 thereto. The difference in location between the chuck 330and the substrate 104 when secured thereto is minimal.

The photolithography system 300 may include an encoder for measuring thelocation information of the substrate 104 disposed on the one or morechucks 330. The location of the substrate 104 on the chuck 330 may alsobe measured during operation by a plurality of interferometers. Theinterferometers may be aligned with mirrors located closer to thesubstrate in the Z-direction, i.e., vertical direction, than theencoder. The interferometers may be any suitable interferometers, suchas high stability plane mirror interferometers. The location informationof the substrate 104 measured by the interferometers or encoder may beprovided to a controller 170 which may additionally control the motionof the chuck 330. The controller 170 may be electronically coupled withthe metrology system 100 and communicate therewith information about thesubstrate 104. For example, the metrology system 100 may providemeasurement information suitable for calculating a global and localtransformation about the substrate 104 to the controller 170.

The photolithography system 300 may include one or more processing units362. The processing unit 362 may communicate with the aforementionedcontroller 170. The processing unit 362 may be supported by a support.The two or more chucks may pass under the processing unit 362. In oneembodiment, the processing unit 362 is a pattern generator configured toexpose a photoresist in a photolithography process. In some embodiments,the processing unit 362 may be configured to perform a masklesslithography process. The processing unit 362 is utilized to generate amaskless direct patterning of the substrate 104. The processing unit 362may include a plurality of image projection systems disposed in a case.During operation, one or more chucks 330 may move from a loadingposition and pass under the processing unit 362. The chuck may also movein an orthogonal direction by moving along a second track for processingand/or indexing the substrate 104. Alternately, the processing unit 362may move in a first direction and/or a second direction over the chuck330 for processing and/or indexing the substrate 104 disposed on thechuck 330.

The metrology system 100 and the photolithography system 300 may work inconcert for correcting die misplacement on the substrate 104 by usingmeasurement information from the metrology system 100 to adjust thedigital mask provided by the processing unit 362 during aphotolithography process. The photolithography system 300 may detectthree or more reference points to calculate a second globaltransformation for the substrate 104. In general, this is different thanthe global transformation obtained from the metrology system 100. Thesecond global transformation is combined with per die localtransformation from the metrology system 100 to calculate an effectivetransformation for the substrate 104. The effective transformation maybe a 2D model representation of the surface of the substrate 104.Alternately, the effective transformation may be a 3D model of thesurface of the substrate 104. The effective transformation is applied asa correction to the digital mask of the photolithography system 300during scanning for printing a layer of material on the substrate 104.If the misplacement signature is repeatable, i.e., the localtransformation is consistent from one substrate to a next, offlinecharacterization of each individual substrate 104 by the metrologysystem 100 can be made faster by measuring only a limited number of diesinstead of all the dies. This procedure can also be applied in thosecases where full accuracy isn't needed or required, such as where anapproximation is sufficient.

FIG. 4 is a schematic view depicting a plurality of dies 152 on thesubstrate 104. The schematic view is merely representative of themisalignment and skew of dies 152 on the substrate 104. The substrate104 may have a first row 410, a second row 420 and an n^(th) row 430 ofdies 152. The dies 152 on the top surface 118 of the substrate 104 maybe misaligned such that the first row 410 of dies 152 may be along acurve (Shown by the dotted line). In contrast, the second row 420 may bemore linear aligned as shown by the dotted line. In some embodiments,each of the rows 410, 420 430 may be misaligned with adjacent rows oreven different from one substrate 104 to the next substrate. The dies152 may additionally be skewed from adjacent dies within a respectiverow 410, 420 430.

pm The first die 142 may have a plurality of features 452 formed thereinor thereon. The first die 142 may have interconnects 453 and vias 455formed therein. The vias 455 and interconnects 453 may connect features452 of the first die 142 with other features 452 of the first die 142.Alternately, the features 452, vias 455 and interconnects 453 may beconfigured to align with features formed on other dies or chips. Thelocal and global transformation may assist in aligning the mask to thefeatures from one operation to the next. For example, the first die 142may have a first feature 461 and a second feature 462 which are orientedalong the first row 410. The local transformation provides positioninformation for the first feature 461 and the second feature 462 suchthat subsequent operations will align with said features. For example,an etch operation is performed within the critical dimensions forforming a via in the first and second feature 461, 462. Thus, even themisalignment and skew of the dies 152 shown on the substrate 104 may beprocessed by correcting with the global and local transformation of thesubstrate 104 and dies 152 introduced above.

FIG. 5 depicts a method for creating a global transformation for alocation of the dies on the substrate. At operation 510, three or morepoints are detected on each die on a substrate to calculate theorientation of each die for local transformation. In one embodiment, thethree points may be distally spaced far from each other along aperimeter of the die. In a second embodiment, vertices for each die maybe detected to more closely determine the shape and orientation of thedie. The vertices provide the intersection of each side segment of thedie. Thus, the vertices depict the points representing the outer boundsof limits of the area for the die. A set of points may be associatedwith each die.

At operation 520, at least three points are used to calculate a globaltransformation of the substrate. The global transformation may be usedto characterize warpage or other irregularities in the profile of thesubstrate. Each of the three points are selected from a different set ofthe detected points. The three or more sets selected may be distallyorientated on the substrate. The global transformation may be calculatedfrom reference points distributed about the substrate. For example, thesubstrate may have three or more reference points which are notassociated with the dies. The reference points may be provided on thetop surface of the substrate may be measured and used to calculate theglobal transformation of the substrate.

In another alternative, calculating the global orientation of thesubstrate may entail measuring a value for an x/y rotation of thesubstrate, measuring a value for an expansion of the substrate,measuring a value for an orientation of the dies on the substrate, andcalculating the global transformation from the measured values.

In yet another alternative, all detected points from each die may beused to characterize warpage of the substrate by fitting variation to asmooth function. The warpage creates a continuous variation and can beapproximated by polynomial while die misplacement is mostly discrete.Additionally, per die models may be created to fit the variation in thesubstrate modeled by the global transformation. Thus, the two models,i.e., local transformation and global transformation, can be generatedtogether by setting up the combined problem modeled at the per dielevel. Accordingly, a combined model to capture this per die variationand global warpage effects may be generated.

At operation 530, the global transformation and local transformation ofthe substrate is stored. The transformations may be stored in memory foraccess by other equipment. In one embodiment, the transformations arestored on the metrology system and accessed there by other processingequipment. In another embodiment, the transformations are stored in thephotolithography system. In yet other embodiments, the transformationsare stored in network storage accessible to network attached devices.

The method disclosed in FIG. 5 provides for detecting reference pointsand die locations for a substrate and calculating the localtransformation of dies on a substrate and the global transformation forcorrecting the pattern placement of the dies on the substrate. Thetransformations are stored in a location accessible to othersemiconductor equipment employed in the processing of the substrate. Themethod is usefully extended to processing of the substrate onsemiconductor processing equipment. For example, the transformations maybe used for adjusting or applying a mask when etching the substrate.

FIG. 6 depicts a method for creating an effective transformation for alithography operation on the substrate. At operation 610, at least threereference points are detected for calculating a new globaltransformation. The detection may be performed by a lithography tool,etch tool, or other suitable semiconductor processing tool in which thesubstrate is disposed. In one embodiment, a lithography tool detects atleast the three reference points for calculating the new globaltransformation. The new global transformation calculated by thesemiconductor processing tool may be different than the globaltransformation previously calculated by the metrology tool.

At operation 620, the new global transformation calculated by theprocessing tool is combined with the per die local transformationprovided by the metrology tool for creating an effective transformation.The effective transformation being a combination of the per die skew andthe profile of the substrate. The new global transformation may becalculated similarly to the methods disclosed above for calculating theglobal transformation provided by the metrology tool. For example,reference points, die location markers, points or vertices, or othersuitable measured locations on the substrate may be used for modelingthe profile of the substrate.

At operation 630, the effective transformation is applied as acorrection to a digital mask of the processing tool. For example, thedigital mask of a lithography tool may be skewed, rotated, stretched orotherwise modified by applying the effective transformation to thedigital mask. During scanning to print redistribution lithographylayers, the digital mask aligns with the actual die locations on thesubstrate to ensure features are formed correctly within the allowablecritical dimensions.

The method described with reference to FIG. 6 may be used with a varietyof semiconductor processing tools. The effective transformation of thedigital mask is well suited for and provides for correction to a digitalmask during photolithography scanning. Advantageously, the effectivetransformation aligns the per-die digital mask with a model basedpattern placement correction and corrects warpage of the substrate alongwith the orientation of the die structure. The effective transformationcorrects for the orientation of the die structure with the per-diedigital mask alignment correction at the lithography tool prior toprinting redistribution lithography layers on the die structure.

If the measured misplacement for the dies are repeatable from onesubstrate to another, i.e., is a repeatable a pattern shared by eachsubstrate, offline characterization by the metrology tool can be madefaster by measuring limited number of dies instead of all dies. This mayalso be performed in those cases when full accuracy isn't needed. Ifmultiple dies are pick-and-placed as a group (die group), threemeasurement from each group is sufficient enough to calculate x/yrotation, expansion, and shift for the entire group. This increasescharacterization throughput by eliminating redundant measurements. Themodels generated remain the same except die becomes “die group” and thenumber of measurement sets correspond to the number of die groupsinstead of dies.

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

1. A method for correcting a pattern placement on a substrate, themethod comprising: detecting three reference points for a substrate;detecting a plurality of sets of three die location points, each setindicative of an orientation of a die, the plurality of sets include afirst set associated with a first die and a second set associated with asecond die; calculating a local transformation for an orientation of thefirst die and the second die on the substrate; selecting threeorientation points from the plurality of sets of three die locationpoints wherein the orientation points are not members of the same set;calculating a first global transformation of the substrate from theselected three points from the set of points; and storing the firstglobal transformation and the local transformation for the substrate. 2.The method of claim 1 further comprising: positioning the substrate in alithography tool; detecting the three reference points; calculating asecond global transformation from the three reference points; combiningthe second global transformation with the local transformation tocalculate an effective transformation of the substrate; and applying theeffective transformation as a correction to a digital mask duringscanning.
 3. The method of claim 2 further comprising: correcting forthe orientation of the die structure by applying the effectivetransformation to generate a per-die digital mask alignment correction;and printing redistribution lithography layers on the die structure. 4.The method of claim 3 further comprising: aligning the per-die digitalmask with a model based pattern placement correction; and correctingwarpage of the substrate and orientation of the die structure.
 5. Themethod of claim 1, wherein calculating the first global transformationof the substrate comprises: (a) measuring a value for an x/y rotation ofthe substrate, (b) measuring a value for an expansion of the substrate;(c) measuring a value for an orientation of the dies on the substrate;and (d) calculating the first global transformation from the valuesmeasured at (a), (b) and (c).
 6. The method of claim 1, whereinselecting three points from the set of points comprises: selecting threealignment marks.
 7. A non-transitory computer readable storage mediumcomprising a program product which, when executed, is configured toperform an operation for correcting a pattern placement on a substrate,the operation comprising: detecting three reference points for asubstrate; detecting a plurality of sets of three die location points,each set indicative of an orientation of a die, the plurality of setsinclude a first set associated with a first die and a second setassociated with a second die; calculating a local transformation for anorientation of the first die and the second on the substrate; selectingthree orientation points from the plurality of sets of three dielocation points wherein the orientation points are not members of thesame set; calculating a first global orientation of the substrate fromthe selected three points from the set of points; and storing the firstglobal transformation and the local transformation for the substrate. 8.The non-transitory computer readable storage medium of claim 7 furthercomprising: positioning the substrate in a lithography tool; detectingthe three reference points; calculating a second global transformationfrom the three reference points; combining the second globaltransformation with the local transformation to calculate an effectivetransformation of the substrate; and applying the effectivetransformation as a correction to a digital mask during scanning.
 9. Thenon-transitory computer readable storage medium of claim 8 furthercomprising: correcting for the orientation of the die structure byapplying the effective transformation to generate a per-die digital maskalignment correction; and printing redistribution lithography layers onthe die structure.
 10. The non-transitory computer readable storagemedium of claim 9 further comprising: aligning the per-die digital maskwith a model based pattern placement correction; and correcting warpageof the substrate and orientation of the die structure.
 11. Thenon-transitory computer readable storage medium of claim 7, whereincalculating the first global orientation of the substrate comprises: (a)measuring a value for an x/y rotation of the substrate, (b) measuring avalue for an expansion of the substrate; (c) measuring a value for anorientation of the dies on the substrate; and (d) calculating the globaltransformation from the values measured at (a), (b) and (c).
 12. Thenon-transitory computer readable storage medium of claim 7, whereinselecting three points from the set of points comprises: selecting threealignment marks.
 13. A system, comprising: a processor; and a memory,wherein the memory includes an application program configured to performan operation for correcting a pattern placement on a substrate, theoperation comprising: detecting three reference points for a substrate;detecting a plurality of sets of three die location points, each setindicative of an orientation of a die, the plurality of sets include afirst set associated with a first die and a second set associated with asecond die; calculating a local transformation for an orientation of thefirst die and the second on the substrate; selecting three orientationpoints from the plurality of sets of three die location points whereinthe orientation points are not members of the same set; calculating afirst global orientation of the substrate from the selected three pointsfrom the set of points; and storing the first global transformation andthe local transformation for the substrate.
 14. The system of claim 13further comprising: positioning the substrate in a lithography tool;detecting the three reference points; calculating a second globaltransformation from the three reference points; combining the secondglobal transformation with the local transformation to calculate aneffective transformation of the substrate; and applying the effectivetransformation as a correction to a digital mask during scanning. 15.The system of claim 14 further comprising: correcting for theorientation of the die structure by applying the effectivetransformation to generate a per-die digital mask alignment correction;and printing redistribution lithography layers on the die structure. 16.The system of claim 15 further comprising: aligning the per-die digitalmask with a model based pattern placement correction; and correctingwarpage of the substrate and orientation of the die structure.
 17. Thesystem of claim 13, wherein calculating the first global orientation ofthe substrate comprises: (a) measuring a value for an x/y rotation ofthe substrate, (b) measuring a value for an expansion of the substrate;(c) measuring a value for an orientation of the dies on the substrate;and (d) calculating the global transformation from the values measuredat (a), (b) and (c).
 18. The system of claim 13, wherein selecting threepoints from the set of points comprises: selecting three alignmentmarks.